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Extreme ultraviolet lithography
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81	Metal nanoparticle arrays for near field optical lithography Add to Reading List Source URL: daedalus.caltech.edu Language: English - Date: 2006-11-26 19:59:36 Nanotechnology Nanomaterials Spectroscopy Condensed matter physics Biophysics Surface plasmon resonance Nanolithography Extreme ultraviolet lithography Plasmon Physics Chemistry Materials science
82	SPATIAL AND TEMPORAL CHARACTERISTICS OF MACROSPICULES Shadia Rifai Habbal Harvard-Smithsonian Center for Astrophysics Raymond Gonzalez National Astronomy and Ionosphere Center, Arecibo Observatory Add to Reading List Source URL: soho.nascom.nasa.gov Language: English - Date: 2000-02-09 12:15:38 Electromagnetic radiation Astrophysics Sun Light sources Corona Extreme ultraviolet lithography Extreme ultraviolet Very Large Array Ultraviolet Plasma physics Space plasmas Physics
83	INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS[removed]EDITION Add to Reading List Source URL: public.itrs.net Language: English - Date: 2014-03-30 21:14:00 Extreme ultraviolet lithography Multiple patterning Nanoimprint lithography Immersion lithography Electron beam lithography Maskless lithography Photomask Resist Lithography Microtechnology Materials science Technology
84	Published in CP730, Atomic Processes in Plasmas: 14th APS Topical Conference on Atomic Processes in Plasmas , edited by J. S. Cohen, S. Mazevet, and D. P. Kilcrease, (AIP, New York, 2004) p[removed]Visible, EUV, and X- Add to Reading List Source URL: physics.nist.gov Language: English - Date: 2005-02-11 16:09:07 Particle physics Nuclear physics Electron beam Electron beam ion trap Extreme ultraviolet lithography Lawrence Livermore National Laboratory Electronvolt Extreme ultraviolet X-ray astronomy Physics Atomic physics Plasma physics
85	Physics Laboratory SuPPorting u.S. induStry, government, and the Scientific community by Providing meaSurement ServiceS and reSearch Add to Reading List Source URL: physics.nist.gov Language: English - Date: 2010-08-23 01:41:17 Quantum electrodynamics Extreme ultraviolet lithography National Institute of Standards and Technology Extreme ultraviolet Photoemission electron microscopy Electron Ultraviolet Atomic clock Spectroscopy Physics Electromagnetic radiation Electromagnetic spectrum
86	VOLUME 77, NUMBER 8 PHYSICAL REVIEW LETTERS 19 AUGUST 1996 Add to Reading List Source URL: www.engr.colostate.edu Language: English - Date: 2007-09-27 10:48:20 Acronyms Laser Photonics X-ray laser Plasma Extreme ultraviolet lithography Active laser medium Dense plasma focus Ti-sapphire laser Physics Optics Laser science
87	template for two-page abstracts in Word 97 (PC) Add to Reading List Source URL: www.lpi.usra.edu Language: English - Date: 2007-04-16 10:34:52 Planetary science Geophysics Plasma physics Atmosphere Plasmasphere Extreme ultraviolet lithography Space weather IMAGE SELENE Spaceflight Space Space plasmas
88	NuSTAR ground calibration: The Rainwater Memorial Calibration Facility (RaMCaF) Nicolai F. Brejnholta , Finn E. Christensena , Anders C. Jakobsena , Charles J. Haileyb , Jason E. Koglinb , Kenneth L. Blaedelb , Marcela S Add to Reading List Source URL: www.nustar.caltech.edu Language: English - Date: 2012-01-15 21:46:43 Electromagnetic radiation Optics Space telescopes X-ray telescopes Telescopes Nuclear Spectroscopic Telescope Array X-ray optics Optical coating Extreme ultraviolet lithography Radiography Science Observational astronomy
89	INTERNATIONAL TECHNOLOGY ROADMAP FOR SEMICONDUCTORS[removed]EDITION Add to Reading List Source URL: public.itrs.net Language: English - Date: 2014-03-21 15:18:53 Design Extreme ultraviolet lithography Occupational safety and health Semiconductor Equipment and Materials International Design for the Environment Sustainability Environment International Technology Roadmap for Semiconductors
90	1 Yield Enhancement Difficult Challenges Difficult Challenges[removed]Summary of Issues Add to Reading List Source URL: public.itrs.net Language: English - Date: 2014-03-27 11:44:03 Scanning probe microscopy Microscopy Failure analysis Energy-dispersive X-ray spectroscopy Extreme ultraviolet lithography PCOLA-SOQ Science Scientific method Measuring instruments

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